The measurement accuracy is verified on a calibrated measuring plate according to IPC 9850. The system meets the requirements specified therein for measuring equipment capability and reproducibility for the specified process limits.

 

Measuring task Verifiable process limits
x/y [µm] theta [°]
TQFP100 10 0.07
0603 Chip 20 1.00
SOIC16 25 3.00